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This report describes the development of an air fuel ratio sensor with a linear voltage output, and its signal processing module that is able to calibrate the sensor output function on the measuring point of the 20.9% oxygen concentration in atmospheric air and the zero diffusion current at stoichiometry as the reference. This sensing system is effective when applied to air fuel ratio PID feed back engine control and it is able to realize the reduction of initial variability of sensors, interchangeability of sensors, and long term output change of the sensor.

This paper describes the sensing principle of a new air-fuel ratio sensor, which has the ability to detect air-fuel ratios in rich, stoichiometric and lean ranges. The sensing part is composed of a gas diffusion layer and a zirconia solid electrolyte with a pair of electrodes which function as an anode and a cathode. The anode and the cathode electrodes are exposed to the atmosphere and the exhaust gas, respectively. To obtain the bidirectional pumping current between the two electrodes, the potential of the cathode is held to a constant value higher than the electronic circuit ground. The electromotive force induced between the two electrodes is forcibly controlled to a constant value by the electronic circuit. In this composition, three ranges of air-fuel ratio can be detected by the amount of pumping current.

A semiconductor capacitance -type accelerometer utilizing a pulse width modulation (PWM) electrostatic servo technique has been developed. Highly accurate detection of very small and low frequency acceleration became possible with the PWM sensing method. The limited air gaps between the movable and fixed electrodes ensured compatibility between high sensitivity and durability, while transverse sensitivity and temperature coefficient were reduced due to the symmetric structure of the sensing device. This sensor has been designed for the measurement range of 0 to ±1g, ±2g and 0 to 50Hz. The accelerometer is composed of two chips: the sensing device made by silicon micromachining technology and the custom IC made by bipolar CMOS technology. In this paper, we present the fundamental sensing principle, the sensing device, the custom IC and the characteristics of the new accelerometer.

The oxygen ion conductive solid electrolyte cell served as a device for measuring the combustibles content and the oxygen content of an exhaust gas. The cell is comprised of a tubular electrolyte, two opposed electrodes and a porous diffusion layer located on the outer electrode surface. The sensor is employed to measure both rich and lean air fuel ratio through the use of an electronic circuit pumping the oxygen ions to achieve a constant voltage between the electrodes. The wide range detecting capability makes it particularly attractive for air fuel ratio control applications associated with the internal combustion engine. The result of the performance tests are as follows, Detecting range (air excess ratio λ) : 0.8 - “∞ Step response time constant (63%) : 200ms Warm up time. - less than 80 sec at 20°C We found in the durability test concerned with the heat cycle and contamination that if initial aging treatment is applied the output variation ratio (. λ/λ) is limited with in : 5%.

The detection range of an air-fuel ratio sensor is expanded in the rich A/F region. Using a simulation technique, the limiting cause of the detection range in the rich A/F region is identified as insufficient combustion rates of CO and H2 with O2 on the electrode, which prevent realization of a limited diffusion state which is necessary to detect the air-fuel ratio. Applying an improved diffusion layer to decrease the diffusion rates and an improved electrode to increase the combustion rates, it is demonstrated that the detection limit can be expanded to λ=0.6 while that of a conventional sensor is λ=0.8.