Search Results

The architecture of a monolithic, dual axis, low cost surface micromachined [1] accelerometer is described, initial characterization results are presented, and issues surrounding the intended application are discussed. While the fabrication technology for the integrated mechanical sensor and electronics is essentially the same as that which supported earlier single axis products [2] [3] [4] [5] [6], a fundamentally different circuit architecture leads to much more compact and higher performance second generation devices. Compared to available bulk micromachined accelerometer sensors, surface micro-machined sensors are typically 20X smaller (0.58 mm x 0.66 mm) and have a natural axis of sensitivity (in the plane of the chip) that facilitates multi-axis sensing.