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The principle, simulation, design, characteristics and application of touch mode capacitive pressure sensors for embedded monitoring of tire pressure are presented In touch mode operation, the diaphragm of the Capacitive pressure sensor is touching the substrate structure The advantages of this mode of operation are near linear output, large over-range pressure and robust structure that make it capable to withstand harsh industrial field environment When properly packaged, the device can be used to measure fluid flow, force, acceleration, and displacement, etc in automotive applications