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The intention of the presented work was to develop a new simulation tool that fits into a CFD (computational fluid dynamics) workflow and provides information about the soot particle size distribution. Additionally it was necessary to improve and use state-of-the-art measurement techniques in order to be able to gain more knowledge about the behavior of the soot particles and to validate the achieved simulation results. The work has been done as a joint research financed by the European Community under FP5.

This paper reports on a new generation of silicon gyroscopes, which can be used as angular rate sensors for roll-over sensing or navigation control. The sensor is fabricated in standard Si-surface micromachining technology and encapsulated under vacuum conditions using an Si-micromachined cap wafer. The sensor consists of an electrostatically driven oscillating disk, which reacts with a tilt movement when an angular rate is applied due to the conservation law for angular momentums. The tilt movement is then detected capacitively by electrodes on the substrate underneath the oscillating disk. The sensor is packaged in a standard SMD housing (PLCC44).