Development of a Hydrogen Gas Sensor Using Microfabrication Technology 921176
In recent years, microelectronic fabrication techniques such as photolithographic reduction, thick and thin film and reactive sputtering metallization, chemical and plasma etching, etc. have been applied to the production of miniature and microsize chemical sensors. The introduction of solid electrolytes and conductive polymers further enhances the applicability of electrochemical and chemical sensors, particularly in a gaseous environment. Recent advances in micromachining technology also add new dimensions to the development of chemical sensors.
Citation: Liu, C., Wu, Q., Stuczynski, M., and Madzsar, G., "Development of a Hydrogen Gas Sensor Using Microfabrication Technology," SAE Technical Paper 921176, 1992, https://doi.org/10.4271/921176. Download Citation
Author(s):
Chung-Chiun Liu, Qinghai Wu, Matthew Stuczynski, George C. Madzsar
Affiliated:
Case Western Reserve Univ.
Pages: 5
Event:
International Conference On Environmental Systems
ISSN:
0148-7191
e-ISSN:
2688-3627
Related Topics:
Chemicals
Sensors and actuators
Electrolytes
Polymers
Gases
Hydrogen fuel
Fabrication
Production
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