MEMS Pressure and Acceleration Sensors for Automotive Applications 2003-01-0204
This paper reviews MEMS product applications in a very demanding automotive environment. Our particular interest is in the MEMS inertial and pressure sensors. Specifics of transducer manufacturing technologies will be explained in details. Also advantages and disadvantages of piezoresistive versus capacitive sensing phenomena will be discussed. Finally, main aspects of the packaging effects on the final device parameters and performance are considered too.
Citation: Verma, R., Gogoi, B., and Mladenovic, D., "MEMS Pressure and Acceleration Sensors for Automotive Applications," SAE Technical Paper 2003-01-0204, 2003, https://doi.org/10.4271/2003-01-0204. Download Citation
Author(s):
Rajan Verma, Bishnu P. Gogoi, Dragan Mladenovic
Also in:
Vehicle Sensors-SP-1782, Sensors and Transducers, Second Edition-PT-105, SAE 2003 Transactions Journal of Passenger Cars - Electronic and Electrical Systems-V112-7
Related Topics:
Microelectromechanical devices
Sensors and actuators
Packaging
Pressure
Logistics
Vehicle acceleration
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