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A small. low-cost piezoresistive acceleration sensor suitable for automotive applications such as advanced breaking control and suspension control systems has been developed. A piezoresistive semiconductor sensor has such advantages as high output linearity, long-term output repeatability and DC response a piezoelectric sensor doesn't feature. One drawback. however, is that piezoresistive characteristics are quite temperature sensitive: Such that temperature dependence of DC offset and span have to be compensated with a certain electrical circuit. With 1 mV/Vs/G, the low sensitivity of the acceleration sensor [Vs:bridge voltage. G:gravitational acceleration], the temperature shift of DC offset represented in terms of the sensitivity, becomes relatively high.