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In this work, the goal of enhanced reliability through redundancy is explored. Two levels of fusion have been defined: the first is a fusion of sensors, redundant in both number and type, and the second is a statistical fusion of the resulting data at a software level. An intermediate preprocessing level is required to connect both fusions. The various types of sensors which are included are bulk micromachined flow, pressure and hydrogen sensors and a thin film poly-crystalline silicon temperature sensor. Individual sensors have been fabricated and packaged in arrays. Associated preprocessing has been designed to be able to handle all of the signals coming from each sensor and prepare them for statistical analysis. Data fusion algorithms have been written and tested.