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An integrated pressure sensor is presented which uses a custom digital signal processor and non-volatile memory to calibrate and temperature compensate a family of pressure sensor elements for a wide range of automotive applications. Unlike previously introduced analog solutions, this programmable signal conditioning engine operates in the digital domain utilizing a calibration algorithm that accounts for higher order effects beyond the realm of most analog signal conditioning approaches, and provides enhanced features that typically were implemented off-chip (or not at all) with traditional analog signal conditioning solutions that use laser or electronic trimming. A specially developed digital communication interface permits calibration of the individual sensor module via connector pins after the module has been fully assembled and encapsulated.

The automotive pressure sensor is one of the most widespread applications of a micromachined device, and has evolved into a relatively mature technology, expanding beyond its original use as an engine control sensor into other vehicle control and diagnostic systems. The need for flexibility in various applications, low cost, high volume manufacturing capability, and survivability in harsh environments has strongly influenced sensor signal conditioning, calibration, element design, and packaging. Many of the issues affecting the development and commercialization of micromachined automotive pressure sensors are also relevant to other emerging microfabricated devices. This paper shows how the commercial success of a product using microfabricated technology is highly dependent upon other core competencies, beyond just the capability to perform the micromachining operations necessary to create the sensing device.