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High temperature power electronics have become a vital aspect of future designs of compact power converters for applications including power conditioning and distributed motor/actuator controls. However, the development of high temperature capacitors had lagged far behind other system components (e.g. semiconductor switches and that can operate at temperature >200°C). The performance of these systems would benefit significantly from components and packaging designed and optimized for high temperature (200°C to 400°C) under generally harsh environmental conditions. In this paper it will be demonstrated that high temperature materials can be successfully fabricated into multilayer ceramic capacitors (MLCC). The properties of various capacitors having application range 200∼500°C will be presented.