Technical Paper
Development of Coaxial Type Thin Film Temperature Sensor with Improved Measurement Accuracy Based on Principle of Thermoelectromotive Force
2018-10-30
2018-32-0032
In order to verify cooling loss reduction effect of internal combustion engine, method for measuring wall surface temperature and heat flux with high accuracy is required. Various methods have been proposed for measuring the cooling loss from the combustion gas to the combustion chamber wall, newly coaxial type thin-film temperature sensor was developed for wall temperature and heat flux measurement by the authors. This sensor consists of thin-film and body and center wire have three junction positions in the case where three materials are different. Therefore, it is necessary to use the same materials for thin-film and body or thin-film and center wire to make two junction points. In this study, sputtering method that can be formed various kinds of alloy materials and film thickness of 0.1~1μm on the sensor surface was chosen.