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The Space Shuttle Orbiter Atmospheric Revitalization Pressure Control System (ARPCS) and the Fuel Cell System (FCS) use a hot wire anemometer type of gas mass flow sensor for flow measurement. In the ARPCS oxygen and nitrogen mass flows are measured and in the FCS oxygen and hydrogen mass flows are measured. The existing flow sensors suffer from certain accuracy limitations and potential failure modes. A new type of commercially developed solid state micro-machined silicon gas mass flow sensor developed by Honeywell was adapted to allow the technology to be assessed for the application. A demonstration test program has been conducted to evaluate the performance characteristics of the new sensor for space system applications and environments. The testing was sponsored by the National Aeronautics and Space Administration (NASA) at the Johnson Space Center (JSC).