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Electronic design on detailed hardware level for automotive safety-related systems requires evaluation of the hardware architecture to cope with random hardware failures. The international standard ISO 26262 - functional safety for road vehicles - claims two methods: hardware architectural metrics and evaluation of safety goal violations as a probabilistic approach. Although the utilization of these analyses is required, annotations of failure data in combination with performing evaluation of a preliminary hardware architecture using deposited failure data is not supported in an integrated model-based development environment. To overcome these inconveniences, we analyzed the ISO 26262, in particular Part 5 for product development at the hardware level, to provide both, meta-model for failure description of detailed hardware and performing evaluation of the hardware architecture. This UML-compliant meta-model expands existing EAST-ADL2 constructs.